In reactive sputtering process with an Ar + O₂ gas mixture, the plasma emission observed near the cathode changes in appearance. When the oxygen content is high, the plasma exhibits a reddish-violet ...
The Perkin-Elmer sputtering tool has the ability to have up to three 8” targets loaded at once. The tool uses an RF power source for sputtering and currently has argon, oxygen, and nitrogen gases for ...
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